Synthesis of phosphorus-doped diamond
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United States of America Patent
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Oct 5, 1999
Grant Date -
N/A
app pub date -
Jan 31, 1997
filing date -
Sep 3, 1996
priority date (Note) -
Expired
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Abstract
A synthesis of phosphorus-doped diamond by a microwave plasma method using a volatile hydrocarbon and hydrogen mixed therewith, as a reaction gas, wherein phosphorus is used as a dopant, and hydrogen bonded to the phosphorus is dissociated so that the phosphorus is introduced into diamond as an impurity without being bonded to hydrogen.
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