Probe station adapter for backside emission inspection
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United States of America Patent
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Sep 28, 1999
Grant Date -
N/A
app pub date -
Jul 14, 1997
filing date -
Jul 14, 1997
priority date (Note) -
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Abstract
An adapter for holding a silicon wafer in an inverted position of a probe station to allow backside emission testing is described. The wafer is positioned in a carrier having an opening therethrough for backside emission testing while the wafer is energized and probed beneath the carrier. A special probe card holder is provided with a self-leveling feature by means of a leveling frame on the probe card holder cooperating with the wafer carrier.
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