Load balanced pressure regulator and method and apparatus for delivering process gas for manufacturing semiconductor devices employing same
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United States of America Patent
Stats
-
Sep 14, 1999
Grant Date -
N/A
app pub date -
Feb 11, 1998
filing date -
Feb 11, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The transient response of a tied diaphragm gas pressure regulator is improved by reducing breakaway friction of a regulator valve with respect to its cooperating valve seat. This is preferably achieved by reducing the lateral load of the valve against the valve seat while the regulator is in a functional mode. In a disclosed embodiment an asymmetrical compression spring applies a force asymmetrically with respect to the axis of the valve. A tool permits adjusting the asymmetry of this force for counterbalancing existing lateral forces on the valve. As a result, overshoot of the gas pressure of the regulator with respect to a set outlet pressure at the onset of flow through the regulator can be substantially reduced or eliminated. The time necessary for providing a stable outlet pressure with the regulator after the onset of flow can also be significantly reduced. A disclosed method and apparatus for delivering a process gas for the manufacture of semiconductor devices advantageously utilize the improved load balanced pressure regulator for more consistent results in the application of materials or elements from the gas to the wafers.
First Claim
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Cited Art Landscape
Patent Citation Ranking
- 13 Citation Count
- G05D Class
- 61.71 % this patent is cited more than
- 26 Age