Multilayer film structure for soft X-ray optical elements
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United States of America Patent
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Aug 31, 1999
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N/A
app pub date -
Jan 17, 1996
filing date -
Jan 19, 1995
priority date (Note) -
Expired
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Abstract
In order to provide a multilayer film structure for soft X-ray optical elements in which a high reflectivity can be attained in even a soft X-ray wavelength region of a wavelength of 10 nm or less including the wavelength range of water window zone, in a multilayer film structure for soft X-ray optical elements wherein a first thin film, being a different type of a second thin film, and the second thin film are piled up in layers to form a multi-layer film, at least one of the aforesaid first thin film and the aforesaid second thin film is made to be an oxide thin film.
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