Dual target cathode assembly with shielding
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United States of America Patent
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Aug 31, 1999
Grant Date -
N/A
app pub date -
Nov 7, 1995
filing date -
Mar 9, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.
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