Method and system for rejuvenating pressurized fluid solvents used in cleaning substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 17, 1999
Issued Date -
N/A
app pub date -
Jan 27, 1998
filing date -
Nov 9, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Method and system of rejuvenating pressurized fluid solvents used for cleaning a substrate in a pressurized vessel. A primary flow of the pressurized fluid solvent is continuously cycled from the pressurized vessel through a series of filters to remove insoluble and soluble contaminants, and then returned to the pressurized vessel. A secondary flow of the pressurized fluid solvent, preferably equivalent to less than about 40% of the primary flow, is directed either continuously or intermittently during the cleaning operation to an evaporator to evaporate the pressurized fluid solvent of the secondary flow into a vapor and to separate contaminants therefrom. The vapor from the evaporator is then either liquified by a compressor or condenser to create rejuvenated pressurized fluid solvent and redirected to the pressurized vessel for further use, or vented to atmosphere and replaced by new pressurized fluid solvent from a supply tank. Pressure equalization lines extend between a storage tank and various system components to allow solvent vapor to displace therebetween.
First Claim
Other Claims data not available