Method of manufacturing an injector for chemical vapor deposition processing
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United States of America Patent
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Aug 10, 1999
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N/A
app pub date -
Jun 4, 1997
filing date -
Jul 18, 1994
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Abstract
A method of manufacturing an injector for chemical vapor deposition (CVD) processing is provided. The method comprises the steps of selecting an elongated member of solid material having first and second ends and a gas delivery surface. At least one elongated passage for receiving a gas is formed in the elongated member and extending between the ends. At least one elongated distribution channel is formed by wire electrode discharge machining (EDM) extending from the elongated passage to the gas delivery surface for providing gas to the gas delivery surface.
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