MBE deposition method employing effusion cell having a unibody crucible
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United States of America Patent
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Aug 3, 1999
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Mar 12, 1997
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May 3, 1995
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Abstract
A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also provides a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.
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