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Abstract

Disclosed is a new ac electric discharging power supply which is capable of permitting electric discharge to appear without difficulty even in the atmosphere of reduced gas pressure or even though undesired dielectric material should be accidentally adhered to the electrode surface, and in which power supply the plasma parameters vary hardly with time. The signal from master oscillator (1) is divided into a plurality of divisions by power divider (2), and each power division is controlled in phase and amplitude by phase-shifters (3) and power amplifiers (4). Oscillating frequency, phase and amplitude are controlled coordinately by control (7), and the final voltages appearing at the output terminals of power amplifiers (5) are applied to electrodes 6, which are arranged in an electric discharging vessel. One output terminals of all power transformers (5) are connected in common, ordinarily in floating condition, thereby permitting electric discharges to appear between selected electrodes (6). The phases and amplitudes of different voltages applied to electrodes (6) may be controlled to be same or appropriate for a particular application. Also, the shape and arrangement of electrodes (6) may be so selected as to be most appropriate for a particular application.

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