Apparatus for producing semiconductor device
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United States of America Patent
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Aug 3, 1999
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N/A
app pub date -
Nov 13, 1996
filing date -
May 7, 1993
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Abstract
A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.
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