Micro-wave plasma device with a metal cooling wire wrapped around the insulating tube
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United States of America Patent
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Jul 27, 1999
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N/A
app pub date -
Feb 19, 1998
filing date -
Feb 21, 1997
priority date (Note) -
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Abstract
This invention is concerned with providing a micro-wave plasma generating device of a simple structure and with good cooling effect of the insulating tube. Micro-wave plasma generating device which generates the plasma by introduction of a processing gas into the insulating tube transversing through the micro-wave waveguide in which the metal wire or the metal rod is spirally wound on and around the insulating tube. An air-blowing means is further provided at a portion of the insulating tube through which the waveguide transverses. The metal wire wound around the insulating tube may be affixed to the tube using solder.
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