Method for preparing crosslinked aromatic polymers as low .kappa. dielectrics
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United States of America Patent
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Jul 20, 1999
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N/A
app pub date -
Jul 16, 1996
filing date -
Jul 16, 1996
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Expired
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Abstract
Amorphously crosslinked aromatic polymeric low .kappa. materials and methods for their fabrication are provided. The subject materials are prepared by a modified transport polymerization process, in which aromatic precursors are pyrolyzed to produce radical comprising aromatic monomeric precursors which are then allowed to polymerize by deposition onto a substrate surface, where during and/or after deposition the growing polymer chain is exposed to a high energy crosslinking agent, such as high energy photons or plasma. The subject crosslinked materials find use in a variety of applications, particularly as low .kappa. dielectrics in the manufacture of integrated circuits.
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