Direct drive rotational motor with axial vacuum

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5921560
SERIAL NO

08796300

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A rotational support assembly for holding and rotating an article. The assembly includes a support member for holding the article and a drive mechanism for rotating the support member. A drive shaft couples the drive mechanism directly to the support member. The assembly also includes a vacuum system including at least one passageway formed in the support member and the drive shaft. The passageway extends between an inlet in the shaft for coupling the passageway to a vacuum source and an outlet opening connected to the surface of the support member for holding the article against the support member by a vacuum.

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Patent Owner(s)

Patent OwnerAddress
SILICON VALLEY GROUP THERMAL SYSTEMS LLC440 KINGS VILLAGE ROAD SCOTTS VALLEY CA 95066

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moshtagh, Vahid Sayad San Jose, CA 1 4

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