Process for purifying niobium alkoxides and tantalum alkoxides
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United States of America Patent
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Jul 6, 1999
Grant Date -
N/A
app pub date -
Sep 17, 1997
filing date -
Nov 8, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process, excellent in the mass productivity and economization, for purifying a niobium alkoxide or tantalum alkoxide containing Fe, Ca, Sr, Na, U, etc. as impurities to attain a purity necessitated for electronic materials or the like is provided. A niobium alkoxide or tantalum alkoxide containing the above-described impurities is dissolved in a solvent to obtain a solution, 1 to 20% of the alkoxide in the solution is hydrolyzed under stirring to form a solid reaction product, and the reaction product is separated from the unreacted alkoxide by the distillation to recover the alkoxide.
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