Vacuum valve control device and vacuum valve
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United States of America Patent
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-
Jul 6, 1999
Issued Date -
N/A
app pub date -
Dec 27, 1996
filing date -
Jun 7, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum valve includes a housing having an operating chamber, a plunger provided in the housing; and a self-lubricating rolling diaphragm provided between the plunger and the housing. The rolling diaphragm may have a tapered form. A vacuum valve further includes a valve rod connected to the plunger and penetrating the housing to connect with a valve body. A self-lubricating shaft seal comes into contact with the valve rod to provide an airtight seal between the housing and the valve rod.
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