Method for manufacturing LCD and TFT
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United States of America Patent
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Jun 22, 1999
Grant Date -
N/A
app pub date -
Jul 8, 1997
filing date -
Dec 26, 1996
priority date (Note) -
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Abstract
Method for manufacturing TFTs including steps of forming a control electrode and control electrode line on a substrate, forming insulating film on the control electrode and the control electrode line, cleaning the substrate with the insulating film formed by a chemical or physical means, forming oxide film on the surface of the control electrode and control electrode line exposed by a film lacking portion generated in the insulating film after cleaning, forming a semiconductor layer via the insulating film on the control electrode, and forming a pair of electrodes constituting a semiconductor element together with the semiconductor layer.
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