Coating station
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United States of America Patent
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Jun 15, 1999
Grant Date -
N/A
app pub date -
Apr 1, 1996
filing date -
Mar 31, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A coating station has a flat sputter source opposite a workpiece receiving arrangement is configured as a planet arrangement. The rotating axes (A.sub.p) of the planets intersect one another on a rotating axis (A.sub.s) of the sun system on the side facing away from the sputter source. As a result, substrates, particularly optical lenses, can be coated in extremely small batches according to given formulas in an advantageously flexible manner.
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