Apparatus and method for selective area deposition of thin films on electrically biased substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jun 8, 1999
Issued Date -
N/A
app pub date -
Aug 5, 1994
filing date -
Nov 9, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ion beam deposition process for selective area deposition on a polarized substrate uses a potential applied to the substrate which allows the ionized particles to reach into selected areas for film deposition. Areas of the substrate to be left uncoated are held at a potential that repells the ionized particles.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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MARTIN MARIETTA ENERGY SYSTEMS INC | OAK RIDGE TN 37831-8243 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Golanski, Andrzej | Le Cheylas, FR | 2 | 7 |
# of filed Patents : 2 Total Citations : 7 | |||
Haynes, Tony E | Knoxville, TN | 7 | 137 |
# of filed Patents : 7 Total Citations : 137 | |||
Zuhr, Raymond A | Oak Ridge, TN | 3 | 14 |
# of filed Patents : 3 Total Citations : 14 |
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Patent Citation Ranking
- 4 Citation Count
- C23C Class
- 1.95 % this patent is cited more than
- 26 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Jan 26, 2017 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Aug 06, 2013 | I | Issuance | |
Jul 17, 2013 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
May 03, 2012 | P | Published | |
Sep 16, 2011 | F | Filing | |
Jun 20, 2005 | PD | Priority Date |

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