Apparatus and method for selective area deposition of thin films on electrically biased substrates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5910220
SERIAL NO

08286371

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An ion beam deposition process for selective area deposition on a polarized substrate uses a potential applied to the substrate which allows the ionized particles to reach into selected areas for film deposition. Areas of the substrate to be left uncoated are held at a potential that repells the ionized particles.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MARTIN MARIETTA ENERGY SYSTEMS INCOAK RIDGE TN 37831-8243

International Classification(s)

loading....
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances199419951996199719981999200020012002200320040255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Golanski, Andrzej Le Cheylas, FR 2 7
Haynes, Tony E Knoxville, TN 7 137
Zuhr, Raymond A Oak Ridge, TN 3 14

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 4 Citation Count
  • C23C Class
  • 1.95 % this patent is cited more than
  • 26 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges511063351696521401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 90100 +05101520253035404550556065707580859095100105110115120

Forward Cite Landscape

Load Citation