Interferometric measurement of surfaces with diffractive optics and planar wavefront imaging
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 1, 1999
Issued Date -
N/A
app pub date -
Jun 30, 1997
filing date -
Jan 19, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An interferometer (10) employs diffractive optics (30 and 40) for measuring errors in test surfaces (14) that differ from planes and spheres. A beam of light (28) having a planar shape is separated into two portions (32 and 34). One of the diffractive optics (30) can be used to reshape the second portion (34) of a beam of light (28) into a non-planar shape along a path of grazing incidence to the test surface (14), and the other diffractive optic (40) can be used to further reshape the second portion (34) back into a planar shape in common with the first portion (32) of the beam of light (28). The two planar beam portions (32 and 34) are recombined to produce an interference pattern (44) representing the errors in the test surface (14).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully