Piezoelectric fluid pump
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United States of America Patent
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May 25, 1999
Grant Date -
N/A
app pub date -
May 22, 1996
filing date -
May 23, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A piezoelectric fluid pump includes a stationary pump base and a plurality of piezoelectric elements arranged in parallel on the stationary pump base, each of the piezoelectric elements having, in a polarizing direction thereof or in a direction perpendicular to the polarizing direction, a first end fixed to the stationary pump base and a free, second end. The free, second ends of respective pairs of adjacent the piezoelectric elements are connected to each other, for respective units of the fluid pump. Between the pair of piezoelectric elements and between the stationary pump base and the connecting means, pressure chambers are defined. There are gaps are between walls of the piezoelectric elements and walls of piezoelectric elements of adjacent units.
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