Energy dispersive X-ray analyzer
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United States of America Patent
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May 11, 1999
Issued Date -
N/A
app pub date -
Aug 14, 1997
filing date -
Nov 25, 1994
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Abstract
In an electron microscope employing an X-ray spectrometer according to the present invention, a collimator is provided in a head portion of the X-ray spectrometer and a part of the collimator is arranged in a leakage magnetic field of an objective lens included in the electron microscope, whereby the orbits of the scattering electrons are curved and hence the scattering electrons are prevented from colliding with the X-ray spectrometer to dissolve the background noises in the X-ray spectrum
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