Process for producing spatially patterned components
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United States of America Patent
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May 11, 1999
Grant Date -
N/A
app pub date -
Mar 13, 1998
filing date -
Mar 13, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process is disclosed for producing spatially patterned components from a body. On the backside of the body, a retardation layer with openings is provided for retarding a removal of the material of the body, and areas of migration-capable material are deposited. The body is subjected to a thermal migration process to form migration regions. Then, in a single material removal step, the components are separated from the body and the migration regions are exposed.
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