Coupling mechanism for connecting a fluid line to a mass flow controller or other device

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United States of America Patent

PATENT NO 5901984
SERIAL NO

08984302

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A coupling mechanism for removably connecting a fluid line to an apparatus such as a mass flow controller and includes a flange member for connection to the apparatus so that it is cantilevered from the apparatus and provides a fluid connection with a bore opening that is vertically aligned. A yoke member is dimensioned to extend over the flange member and have a corresponding fluid conduit and bore that can be aligned vertically with the bore opening on the flange member. A seal member can be positioned between the yoke member and the flange member. A spacer member is mounted in the yoke member and a fastener member can be aligned vertically to exert a force on the flange member to apply a sealing pressure to the seal member while locking the yoke member to the flange member.

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Patent Owner(s)

Patent OwnerAddress
STEC INCKYOTO-SHI KYOTO 601-8510

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishikawa, Masami Miyanohigashi-machi, JP 17 226

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