Method of fabricating composite piezo-electric members and a mask used for the fabrication of the same
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United States of America Patent
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Apr 6, 1999
Grant Date -
N/A
app pub date -
Jun 2, 1997
filing date -
Jun 10, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Composite piezo-electric members having an intended structure are fabricated based on the LIGA process which includes the exposure of synchrotron radiation X-rays, development and lithography. With the intention of reducing the cost of the X-ray exposure mask, it is made of wire gauze having a regular pattern and formed by electrocasting.
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