Terpolymers containing organosilicon side chains
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United States of America Patent
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Mar 23, 1999
Grant Date -
N/A
app pub date -
Jul 16, 1996
filing date -
Aug 8, 1995
priority date (Note) -
Expired
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Abstract
A terpolymer containing 20 to 70 mole percent of an acid labile repeating unit, 3 to 40 mole percent of an acrylic acid or acrylonitrile based repeating unit and a repeating unit containing silicon side chains. The silicon side chain repeating unit is provided in sufficient amounts so that the terpolymer silicon content is 7 to 20 weight percent. The terpolymer is used primarily in the formulation of multilayer positive operating photoresists.
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