Polymer carrier gears for polishing of flat objects
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United States of America Patent
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Mar 16, 1999
Issued Date -
N/A
app pub date -
May 1, 1997
filing date -
Feb 28, 1997
priority date (Note) -
Expired
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Abstract
A carrier is comprised of a thermoplastic polymer such as polyetheretherketone which is formed or fabricated as a uniform thickness, double sided flat sheet of material with wafer passages therethrough and gear teeth formed or fabricated around the peripheral edge thereof so as to be cooperative with a wafer polishing machine. An extrusion or rolling or calendering process provides a flat carrier which is, optionally, coated with thermoset polymer or thermoplastic film.
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