Microcalorimeter x-ray detectors with x-ray lens
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United States of America Patent
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Mar 9, 1999
Grant Date -
N/A
app pub date -
Mar 5, 1997
filing date -
Mar 5, 1997
priority date (Note) -
Expired
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Abstract
Spectroscopic materials analysis wherein a sample under test is bombarded by electrons in a scanning electron microscope to produce an x-ray emission collected over a large solid angle by a polycapillary lens and focused onto the surface of a microcalorimeter detector. The x-ray lens is used to increase the effective collection area of the microcalorimeter detector used in an x-ray spectrometer. By increasing the collection angle, the time period for x-ray collection is reduced and the detector can be located farther from the x-ray source. The x-ray lens is effective over a broad energy range of x-rays, thus providing compatibility with spectroscopic analysis. The microcalorimeter can be calibrated to compensate for any variations in the transmission efficiency of the x-ray lens.
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