Wideband vibration sensor
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United States of America Patent
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Feb 23, 1999
Grant Date -
N/A
app pub date -
Mar 20, 1997
filing date -
Mar 20, 1997
priority date (Note) -
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Abstract
This invention relates to an apparatus for making highly sensitive measurements of acceleration. The vibration sensor includes the use of a movable gate field effect transistor to sense the motion of a cantilever beam with respect to its base, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.
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