Method of sputtering an amorphous carbon overcoat as a protective film on magnetic recording disk
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United States of America Patent
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Feb 23, 1999
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app pub date -
Nov 5, 1997
filing date -
Nov 5, 1997
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Abstract
A thin-film magnetic recording media is prepared which contains a carbon overcoat sputtered on a magnetic recording layer. The carbon overcoat is sputtered on the magnetic recording layer using a sputtering process which is conducted in a sputtering chamber having an inert gas and a mixture of nitrogen gas and hydrogen gas, wherein said nitrogen gas and hydrogen gas are provided at a mole ratio of nitrogen/hydrogen between about 0.5 and about 1. The hydrogen and nitrogen doped amorphous carbon overcoat exhibits excellent mechanical properties and tribological performance.
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