Inflatable elastomeric element for rapid thermal processing (RTP) system
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United States of America Patent
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Feb 9, 1999
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N/A
app pub date -
Jul 17, 1997
filing date -
Jul 17, 1997
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Abstract
A rapid thermal processing (RTP) chamber is disclosed, wherein a transparent plate and a body are sealed with a gas tight seal, and wherein the gas tight seal is activated by inflating an inflatable element.
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