Method of making a multilayer tool surface with PCNA interruption of CVD, and tool made by the process
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United States of America Patent
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Feb 9, 1999
Grant Date -
N/A
app pub date -
Sep 27, 1996
filing date -
May 20, 1994
priority date (Note) -
Expired
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Abstract
A tool is made in a coating vessel, depositing upon the base tool body of a hard metal or cermet, a coating by chemical vapor deposition by admitting to the vessel a reactive gas mixture capable of forming a composition selected from the group which consists of aluminum oxide and of titanium and zirconium carbide, nitride and carbonitride, and of mixtures thereof at a chemical vapor deposition pressure and temperature; and interrupting the chemical vapor deposition by a multiplicity of times by replacing the reactive gas mixture with a nonreactive gas mixture containing components selected from the group which consists of argon, hydrogen, nitrogen and mixtures thereof, lowering a pressure in the vessel to a plasma chemical vapor deposition pressure of 10 to 1000 Pa, effecting a glow discharge at the body with the body being cathodically connected at a negative D.C. voltage of 200 to 1000 volts for a period of 1 to 30 minutes, to effect plasma chemical vapor deposition coating between chemical vapor deposition coating with the reactive mixture.
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