Apparatus for laser beam exposure of a substrate disc

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United States of America Patent

PATENT NO 5867460
SERIAL NO

08827477

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Abstract

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In an apparatus for the laser beam exposure of a substrate disc (5), linked block tables (19, 29) are provided, which have each a piezotranslator (24, 31). This makes it possible to perform a fine correction of the movements very rapidly and very precisely.

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Patent Owner(s)

Patent OwnerAddress
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AGWILHELM-ROHN-STRASSE 25 D-63450 HANAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feick, Eberhard Muchen, DE 3 11
Hensel, Bernd Eschborn, DE 8 141
Hofmann, Friedrich Budingen, DE 7 36
Kaiser, Paul Muchen, DE 9 124
Koop, Hermann Ronnenberg, DE 12 152
Richter, Franz Eichenau, DE 6 108

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