Process for production of glass substrate coated with finely patterned nesa glass membrane
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United States of America Patent
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Feb 2, 1999
Grant Date -
N/A
app pub date -
Aug 18, 1995
filing date -
Aug 18, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for production of a glass substrate coated with a patterned Nesa glass membrane which comprises, in sequence: the first step of coating a photoresist on a glass substrate to form a photoresist membrane, exposing the membrane to electromagnetic waves through a mask and then developing the photoresist to form a patterned photoresist membrane on the glass substrate; the second step of forming a Nesa glass membrane on the entire surface of the glass substrate thus provided with the patterned photoresist membrane; and the third step of removing the patterned photoresist membrane together with the Nesa glass membrane thereon from the glass substrate to leave a patterned Nesa glass membrane on the glass substrate.
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