Surface inspection system
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United States of America Patent
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Jan 26, 1999
Issued Date -
N/A
app pub date -
Sep 29, 1995
filing date -
Jun 20, 1994
priority date (Note) -
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Abstract
A high throughput surface inspection system with enhanced detection sensitivity is described. The acquired data is processed in real time at a rate of below 50 MHz thereby reducing the cost for data processing. Anomalies are detected and verified by comparing adjacent repeating patterns and the height of the surface is monitored and corrected dynamically to reduce misregistration errors between adjacent repeating patterns. Local thresholds employing neighborhood information are used for detecting and verifying the presence of anomalies. The sampled point spread function of the combined illumination and collection system is exploited for anomaly detection and verification.
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