Method and apparatus for rapid thermal processing
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 19, 1999
Grant Date -
N/A
app pub date -
Oct 2, 1995
filing date -
Oct 2, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A thin visible and near IR absorbing plate is placed between the radiation source and the object to be processed in a rapid thermal processing system. The object is heated in part by the near IR and far IR radiation from the thin plate, and the material and optically induced heating inhomogeneities are reduced.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully