Micromachined inferential opto-thermal gas sensor
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United States of America Patent
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Jan 19, 1999
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app pub date -
Apr 6, 1998
filing date -
Apr 30, 1997
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Abstract
A micromachined integrated opto-thermal sensor having a rapidly intensity varying or pulsing light source, an interference filter, shadow masking or reflective blocking of light from thermal sensors, or differential operation, a gas cavity into which the detected gas can flow into via a channel or filter, and thermal detector elements to sense the heating of the gas caused by the absorption of light at a particular wavelength by the specific gas to be detected. Another version of the sensor is one with a dual cavity. One cavity contains the gas to be detected and the other cavity is sealed from the ambient environment and contains no gas. Signals from the detectors from the cavities are subtracted from each other resulting in the elimination of a fixed signal due to radiation impinging the detectors.
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