Work transporting robot and semiconductor device manufacturing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jan 12, 1999
Grant Date -
N/A
app pub date -
Jan 22, 1997
filing date -
Jan 25, 1996
priority date (Note) -
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Abstract
A work transporting robot includes a first, second and third arms each of which is rotationally moved around a common axis by individual driving source within a plane, the plane being parallel to one another, a pair of first coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of one of the first and third arms, a first work supporting table which is connected to the other end of the pair of first coupled arms, a pair of second coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of the other of the first and third arms, and a second work supporting table which is connected to the other end of the pair of second coupled arms, and wherein the first and third arms are disposed in the same side to one another with respect to a plane which includes the axis and the second arm.
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