Ionic substance removing material for use in super-clean room
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United States of America Patent
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Jan 5, 1999
Grant Date -
N/A
app pub date -
Nov 27, 1996
filing date -
Nov 29, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ionic substance removing material for use in a super-clean room and a method of manufacturing the material are disclosed. The material includes an ion exchanger capable of an ion exchange reaction, a non-ion exchange permeable layer and an anti-dust generation layer. The material is secured by the surface of a concrete wall.
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