Process of vacuum annealing a thin film metallization on high purity alumina

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United States of America Patent

PATENT NO 5856235
SERIAL NO

08421809

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Abstract

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A thin-film microcircuit comprising fabricating a substrate of high-purity, densely packed alumina ceramic with a fine grain size, and metallization deposited thereon and applying a vacuum anneal to the metallization.

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Patent Owner(s)

Patent OwnerAddress
NORTHROP GRUMMAN SYSTEMS CORPORATION2980 FAIRVIEW PARK DRIVE FALLS CHURCH VA 22042-4511

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koh, Wei NMI Irvine, CA 1 0
Louie, Wesley J Redondo Beach, CA 2 1

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