Process for recovering SF6 from a gas
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United States of America Patent
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Jan 5, 1999
Grant Date -
N/A
app pub date -
May 15, 1997
filing date -
May 15, 1997
priority date (Note) -
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Abstract
A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate stream rich in SF.sub.6 and a permeate stream rich in at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O.
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