Combination cryopump/getter pump and method for regenerating same
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United States of America Patent
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Jan 5, 1999
Grant Date -
N/A
app pub date -
Mar 25, 1997
filing date -
Mar 26, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A combination cryopump/getter pump including a cryopump section having a cryopump inlet, a getter pump section having a getter pump inlet, and a mechanism for coupling the cryopump section and the getter pump section to a single port of a process chamber to be evacuated. Preferably, a cylindrical cryopump section surrounds a cylindrical getter pump section. Preferably, the cryopump section and the getter pump section are coupled to the common port of the process chamber by a gate valve mechanism. In one embodiment of the present invention, the gate valve mechanism isolates the cryopump inlet and the getter pump inlet when in a closed position, and in another embodiment of the present invention the gate valve does not isolate the cryopump inlet from the getter pump inlet when in a closed position. Preferably, thermal insulation is provided between the getter pump section and the cryopump section to thermally isolate the two sections. The cryopump section preferably includes both a 15.degree. K array and a 80.degree. K array.
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