Apparatus for drawing single crystals by the czochralski method

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United States of America Patent

PATENT NO 5853479
SERIAL NO

08759975

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Abstract

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An image of the meniscus ring (21) between the crystal (20) and the melt (4) is formed by optical means (12, 24) on a sensor, the signals of which yield the actual value for the diameter of the crystal. Two optical measuring devices are provided, the optical paths of which are defined by base points on the meniscus ring (21) and two planes which are offset by 90.degree. to each other and which are parallel to the main axis of the crystal and in tangential contact with the meniscus ring (21). The two optical paths are preferably set up to intersect, their intersection being in the viewing window.

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Patent Owner(s)

Patent OwnerAddress
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AGWILHELM-ROHN-STRASSE 25 D-63450 HANAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Altekruger, Burkhard Alzenau, DE 13 74
Aufreiter, Joachim Alzenau, DE 10 55
Bruss, Dieter Bruchkobel, DE 9 40

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