Acoustic sensor as proximity detector
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United States of America Patent
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Dec 22, 1998
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N/A
app pub date -
Jan 2, 1997
filing date -
Jan 2, 1997
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Abstract
An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick response time, which allows it to be an effective proximity detector. Additionally, the acoustic sensor is not affected by the material of the sample's surface layer.
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