Shape measure device
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United States of America Patent
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-
Dec 8, 1998
Grant Date -
N/A
app pub date -
Sep 7, 1995
filing date -
Sep 8, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed herein is a high-resolution shape measuring device having a scanning device capable of scanning an object to be measured at a high constant rotational speed. The shape measuring device includes a laser light source for generating flashing laser light, a pattern memory storing different flash patterns of the laser light, a polygon mirror as the scanning device, and a CCD camera for picking up an image formed on the object by the scanning of the laser light, wherein the shape of the object is computed according to image data obtained by the CCD camera. The shape measuring device further includes a motor for rotating the polygon mirror and a photodetector for generating a PD signal when the phase of rotation of the polygon mirror becomes a specific phase. The polygon mirror is rotated so as to scan the object plural times in a pickup time per frame of the CCD camera by using one of the flash patterns, and the flash pattern used is reset by the PD signal and is repeatedly used during the pickup time per frame. Further, the number of times of scanning for actually directing the laser light onto the object can be selected from the number of plural times of scanning performed in the pickup time per frame in order to adjust laser light quantity.
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