Method and apparatus for imaging at a plurality of wavelengths
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 24, 1998
Grant Date -
N/A
app pub date -
Jul 2, 1996
filing date -
Jul 2, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An imaging system for imaging a substrate surface at several imaging wavelengths comprises a replaceable beam generating module, a spinning mirror and a controller. The beam generating module generates an imaging beam in dependence on beam command signals. The imaging beam has a wavelength which is a one of the plurality of imaging wavelengths. The beam generating module further presents the imaging beam along a prescribed path, and the beam generating module generates wavelength signals indicative of the imaging beam wavelength. The controller receives the wavelength signals, and generates the beam command signals in dependence on the wavelength signals. The beam command signals control generation of the imaging beam in accordance with a prescribed pattern to image upon the substrate surface.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully