Method for making corrosion resistant electrical components
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United States of America Patent
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Nov 24, 1998
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N/A
app pub date -
May 21, 1996
filing date -
May 21, 1996
priority date (Note) -
Expired
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Abstract
A method is described for forming a corrosion resistant electrical component comprising exposing an electrical component to a first atmosphere containing silicon ions to coat the electrical component with a polysilicon film; and exposing the polysilicon coated component to a second atmosphere containing carbon ions generated from a gaseous mixture comprising a carbon source gas to encapsulate the polysilicon coated electrical component with a diamond-like carbon coating, the carbon source gas having a carbon to hydrogen atom ratio of between about 1:1 and 1:2.
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