Stage apparatus and exposure apparatus provided with the stage apparatus
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United States of America Patent
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-
Nov 24, 1998
Grant Date -
N/A
app pub date -
Mar 28, 1996
filing date -
Jun 15, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A stage apparatus comprises a pedestal, an X axis guide bar which is fixed on the pedestal, an X stage which is movable along an upper surface of the pedestal and the guide bar, and a Y stage which is placed over the X stage and movable along the pedestal in a direction of the Y axis. Vacuum-pre-loadable static pressure air bearings, in which pressures of vacuum ports are independently controllable, are provided on a surface of the X stage opposing to the pedestal and on another surface of the X stage opposing to the X axis guide bar. By using the stage apparatus, the electric power consumption of driving means for movable units can be reduced, the amount of heat generation can be reduced, and the bearing gap, can be adjusted highly accurately after assembling.
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