Device for determining the shape of the wave surface reflected by a substantially plane component
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United States of America Patent
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Nov 17, 1998
Grant Date -
N/A
app pub date -
Jun 26, 1997
filing date -
Jul 10, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a device for determining the shape of the wave surface reflected by a substantially plane component (P), which includes a support (S) for the component (P), an interferometer (I), means for moving the support (S), and a control unit which determines, from the measurements by the interferometer (I), the shape of said wave surface. According to the invention, the device additionally includes a swivelling mirror (M1), which directs the measurement beam (FM) of the interferometer (I) orthogonally onto a surface (2) of the component (P), and an optical sensor (CO), which determines the position of the image of a light point (PO) of the measurement beam (FM), the orientation of the mirror (M1) being controlled in such a way as to bring the light point (PO) back to a reference position automatically.
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