Dual beam laser device for linear and planar alignment
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United States of America Patent
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Nov 17, 1998
Grant Date -
N/A
app pub date -
Jul 3, 1996
filing date -
Jul 3, 1996
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Abstract
A high precision alignment apparatus is provided that utilizes a semiconductor laser device, such as a laser diode, to provide a source laser beam. The alignment apparatus permits the division of a pair of beam components from the source laser beam useful for either linear or planar alignment. A centroid measurement between the beam components provides a corrected reference point that accounts for the inherent instability of the source laser beam to yield a high level of alignment accuracy. For linear alignment purposes, the beam components are collinearly directed. In the alternative, for planar alignment purposes, the beam components may be either collinear or directed in opposite directions, and rotated to sweep respective planar regions. The laser alignment apparatus is capable of providing a level of accuracy heretofore achievable only with gas lasers, while maintaining the economical attributes of commercial semiconductor laser diodes.
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