Crosslinked polymers

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United States of America Patent

PATENT NO 5834531
SERIAL NO

08959832

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Abstract

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Radiation-sensitive compositions comprising a substance which forms acid under the action of actinic radiation and polymers based on combination of different repeating units derived from hydroxy styrene and hydroxy-vinylcyclohexane derivatives wherein a portion of the hydroxyl groups are replaced with either acid-labile acetal or ketal protecting groups and where a portion of the repeating groups comprise two crosslinked species connected via the protecting groups.

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Patent Owner(s)

Patent OwnerAddress
OLIN MICROELECTRONIC CHEMICALS INCNORWALK CONNECTICUT 06856-4500

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Falcigno, Pasquale Alfred Basel, CH 7 101
Holzwarth, Heinz Bad Krozingen, DE 6 97
Kirner, Hans-Jorg Pratteln, CH 8 52
Mertesdorf, Carl-Lorenz Bad Krozingen, DE 10 146
Muenzel, Norbert Heltersheim, DE 7 82
Rohde, deceased Ottmar late of Eimeldingen, DE 2 18
Schacht, Hans-Thomas Rheinfelden, DE 12 120

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